Use of Porous Silicon as an Antireflection in the Structure of Silicon Solar Cells

Abstract

For effective use of porous silicon (PS) as an antireflection coating in the structure of silicon solar cells, it is necessary to take into account the structural and technological characteristics of its production. The proposed technology for creating a frontal contact system consisted of successive thermovacuum deposition on a silicon surface with PS through a photolithographically defined mask of Ti (30 nm), Pd (20 nm), and Ag (30 nm) layers. The width of the contact tracks was 30 μm, the distance between them was about 1 mm, and the total area of the shading of the working surface did not exceed 5%.