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Title: Modified humidity-sensitive ceramics for microelectronics studied by PALS system
Authors: Klym, H.
Dunets, R.
Ivanusa, A.
Kostiv, Yu.
Vasylchyshyn, I.
Keywords: positron annihilation system; spectroscopy; watersorption process; structural analysis
Issue Date: 29-May-2017
Publisher: Institute of Electrical and Electronics Engineers, Kyiv, Ukraine
Citation: Klym H., Dunets R., Ivanusa A., Kostiv Yu. Vasylchyshyn I. Modified humidity-sensitive ceramics for microelectronics studied by PALS system // Proceedings of the 2017 IEEE First Ukraine Conference on Electrical and Computer Engineering (UKRCON), May 29 – June 2, 2017, Kyiv, Ukraine, p. 732-735.
Abstract: Water-adsorption and desorption processes in the modified functional elements based on humiditysensitive MgO-Al2O3 ceramics for microelectronics were studied using specialized positron annihilation lifetime system. It is shown that adsorption of water leads to transformation of positron annihilation spectra in the MgO-Al2O3 ceramics and reflects increasing of positron trapping near grain boundaries of ceramics and orthopositronium decaying in nanopores. Fixation of positron lifetime components results in changes in positron trapping rate.
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