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|Title:||Modified humidity-sensitive ceramics for microelectronics studied by PALS system|
|Keywords:||positron annihilation system; spectroscopy; watersorption process; structural analysis|
|Publisher:||Institute of Electrical and Electronics Engineers, Kyiv, Ukraine|
|Citation:||Klym H., Dunets R., Ivanusa A., Kostiv Yu. Vasylchyshyn I. Modified humidity-sensitive ceramics for microelectronics studied by PALS system // Proceedings of the 2017 IEEE First Ukraine Conference on Electrical and Computer Engineering (UKRCON), May 29 – June 2, 2017, Kyiv, Ukraine, p. 732-735.|
|Abstract:||Water-adsorption and desorption processes in the modified functional elements based on humiditysensitive MgO-Al2O3 ceramics for microelectronics were studied using specialized positron annihilation lifetime system. It is shown that adsorption of water leads to transformation of positron annihilation spectra in the MgO-Al2O3 ceramics and reflects increasing of positron trapping near grain boundaries of ceramics and orthopositronium decaying in nanopores. Fixation of positron lifetime components results in changes in positron trapping rate.|
|Appears in Collections:||2017|
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